High power pulsed magnetron sputtering: fundamentals and applications
Alami, Jones; Bolz, Stephan Frédéric; Sarakinos, Kostas
Amsterdam [u.a.] : Elsevier (2009)
Contribution to a conference proceedings, Journal Article
In: Journal of alloys and compounds : JAL
Volume: 483.2009
Issue: 1/2
Page(s)/Article-Nr.: 530-534
Institutions
- Chair of Surface Engineering [419010]
- Chair of Materials Chemistry [521110]
- Division of Materials Science and Engineering [520000]
Identifier
- DOI: 10.1016/j.jallcom.2008.08.104
- RWTH PUBLICATIONS: RWTH-CONV-013507