Bimetal actors for microsystems by magnetron sputter ion plating

Lugscheider, Erich; Bobzin, Kirsten; Hornig, Thomas; Erdle, Anja

Frankfurt [Main] : Werkstoff-Informationsges. (2002)
Contribution to a book, Contribution to a conference proceedings

In: Proceedings / Materials Week 2001, Materialica / [ed.: Werkstoffwoche-Partnerschaft GbR] International Congress on Advanced Materials, Their Processes and Applications ; (Munich, Germany) : 1.-4.10.2001