Simulation of the deposition process in PVD-technology

Knotek, Otto; Lugscheider, Erich; Barimani, Cyrus; Löffler, Frank; Eckert, P.

Aachen (1995)
Contribution to a conference proceedings

In: 5. International Workshop on Computer Modelling of the Mechanical Behaviour or Materials

Institutions

• Chair of Surface Engineering [419010]