From cathode to substrate : Plasma diagnostics on high power pulsed magnetron sputtering deposition of titanium nitride

Bobzin, Kirsten; Kalscheuer, Christian; Carlet, Marco; Schulze, Christoph Franz Robert (Corresponding author)

Amsterdam [u.a.] : Elsevier (2022)
Journal Article

In: Thin solid films
Volume: 755
Page(s)/Article-Nr.: 139331

Institutions

• Chair of Surface Engineering [419010]