Post-annealing of (Ti,Al,Si)N coatings deposited by high speed physical vapor deposition (HS-PVD)

Bobzin, Kirsten; Brögelmann, Tobias; Kalscheuer, Christian; Liang, Tiancheng (Corresponding author)

Amsterdam [u.a.] : Elsevier Science (2019)
Journal Article

In: Surface and coatings technology
Volume: 375
Page(s)/Article-Nr.: 752-762

Institutions

• Chair of Surface Engineering [419010]