Correlation of the Debye sheath thickness and (Cr,Al)N coating properties for HPPMS, dcMS, CAE and PCAE processes
Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Engels, Marita (Corresponding author)
Amsterdam [u.a.] : Elsevier Science (2017)
Contribution to a conference proceedings, Journal Article
In: Surface and coatings technology
Volume: 332
Page(s)/Article-Nr.: 233-241
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1016/j.surfcoat.2017.06.091
- RWTH PUBLICATIONS: RWTH-2018-220814