Effects of the Ion to Growth Flux Ratio on the Constitution and Mechanical Properties of Cr1-x-Alx-N Thin Films

Banko, Lars; Ries, Stefan; Grochla, Dario; Arghavani, Mostafa; Salomon, Steffen; Pfetzing-Micklich, Janine; Kostka, Aleksander; Rogalla, Detlef; Schulze, Julian; Awakowicz, Peter; Ludwig, Alfred (Corresponding author)

Washington, DC : ACS (2019)
Journal Article

In: ACS combinatorial science
Volume: 21
Issue: 12
Page(s)/Article-Nr.: 782-793