Influence of HPPMS on Hybrid dcMS/HPPMS (Cr,Al)N Processes

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher (Corresponding author); Engels, Martin Gottfried

Amsterdam [u.a.] : Elsevier Science (2018, 2019)
Journal Article

In: Surface and coatings technology
Volume: 358
Page(s)/Article-Nr.: 57-66

Institutions

  • Chair of Surface Engineering [419010]

Identifier