Investigations on the substrate bias influence on reactive HPPMS plasmas
Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Engels, Martin Gottfried (Corresponding author)
Amsterdam [u.a.] : Elsevier (2018)
Journal Article
In: Thin solid films
Volume: 663
Page(s)/Article-Nr.: 62-72
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1016/j.tsf.2018.07.048
- RWTH PUBLICATIONS: RWTH-2018-227769