Space-resolved plasma diagnostics in a hybrid (Cr,Al)N process

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Engels, Martin Gottfried (Corresponding author)

New York, NY : American Institute of Physics (2018)
Journal Article

In: Journal of vacuum science & technology / A
Volume: 36
Issue: 3
Page(s)/Article-Nr.: 031515