Correlation of the Debye sheath thickness and (Cr,Al)N coating properties for HPPMS, dcMS, CAE and PCAE processes

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Engels, Marita (Corresponding author)

Amsterdam [u.a.] : Elsevier Science (2017)
Contribution to a conference proceedings, Journal Article

In: Surface and coatings technology
Volume: 332
Page(s)/Article-Nr.: 233-241