Advanced deposition of hard a-C:Me coatings by HPPMS using Ne as process gas

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Engels, Martin Gottfried (Corresponding author)

Amsterdam [u.a.] : Elsevier Science (2017)
Journal Article

In: Surface and coatings technology
Volume: 332
Page(s)/Article-Nr.: 242-252