Synthesis of a-C coatings by HPPMS using Ar, Ne and He as process gases

Bobzin, Kirsten; Brögelmann, Tobias; Kalscheuer, Christian; Engels, Marita (Corresponding author)

Amsterdam [u.a.] : Elsevier Science (2016)
Contribution to a conference proceedings, Journal Article

In: Surface and coatings technology
Volume: 308
Page(s)/Article-Nr.: 80-89

Institutions

• Chair of Surface Engineering [419010]