Investigation of Reactive HPPMS Process and Influence of Bias Voltage during Deposition of Alumina Coatings

Bobzin, Kirsten; Brögelmann, Tobias; Brugnara, Ricardo H.; Bastürk, Serhan (Corresponding author); Bagcivan, Nazlim

Weinheim : Wiley-VCH Verl. (2016)
Journal Article

In: Advanced engineering materials
Volume: 18
Issue: 4
Page(s)/Article-Nr.: 665-670