Investigation of Reactive HPPMS Process and Influence of Bias Voltage during Deposition of Alumina Coatings
Bobzin, Kirsten; Brögelmann, Tobias; Brugnara, Ricardo H.; Bastürk, Serhan (Corresponding author); Bagcivan, Nazlim
Weinheim : Wiley-VCH Verl. (2016)
Journal Article
In: Advanced engineering materials
Volume: 18
Issue: 4
Page(s)/Article-Nr.: 665-670
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1002/adem.201500417
- RWTH PUBLICATIONS: RWTH-2016-06629