Investigation of Reactive HPPMS Process and Influence of Bias Voltage during Deposition of Alumina Coatings

Bobzin, Kirsten; Brögelmann, Tobias; Brugnara, Ricardo H.; Bastürk, Serhan (Corresponding author); Bagcivan, Nazlim

Weinheim : Wiley-VCH Verl. (2016)
Fachzeitschriftenartikel

In: Advanced engineering materials
Band: 18
Heft: 4
Seite(n)/Artikel-Nr.: 665-670