Aluminum-rich HPPMS (Cr1−xAlx)N coatings deposited with different target compositions and at various pulse lengths

Bobzin, Kirsten; Brögelmann, Tobias; Brugnara, R. H. (Corresponding author)

Amsterdam [u.a.] : Elsevier Science (2015)
Journal Article

In: Vacuum : surface engineering, surface instrumentation & vacuum technology
Volume: 122
Issue: Part A
Page(s)/Article-Nr.: 201-207

Institutions

• Chair of Surface Engineering [419010]