(Cr1-xAlx)N : A comparison of direct current, middle frequency pulsed and high power pulsed magnetron sputtering for injection molding components
Bagcivan, Nazlim; Bobzin, Kirsten; Theiß, Sebastian (Corresponding author)
Amsterdam Elsevier : [u.a.] (2013)
Contribution to a conference proceedings, Journal Article
In: Thin solid films
Volume: 528
Page(s)/Article-Nr.: 180-186
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1016/j.tsf.2012.08.056
- RWTH PUBLICATIONS: RWTH-CONV-079398