Impact behavior of (Ti,Al,Si)N deposited by HPPMS

Bobzin, Kirsten; Bagcivan, Nazlim; Ewering, Mara Therese; Theiß, Sebastian; Bolz, Stephan Frédéric

Amsterdam [u.a.] ; Jena : Elsevier (2009)
Contribution to a conference proceedings, Journal Article

In: Thin solid films
Volume: 518
Issue: 5
Page(s)/Article-Nr.: H2-2-7

Institutions

• Chair of Surface Engineering [419010]