Increasing AlN amount in magnetron sputtered Cr(1-x)Al(x)N PVD-coatings for high temperature applications by means of pulsed power supplies

Lugscheider, Erich; Bobzin, Kirsten; Maes, Michael

Amsterdam [u.a.] : Elsevier (2003)
Contribution to a conference proceedings, Journal Article

In: Surface & coatings technology
Volume: 177/178.2004

Institutions

• Chair of Surface Engineering [419010]