Deposition of solder for micro-joining on M.E.M.S. components by means of magnetron sputtering

Lugscheider, Erich; Bobzin, Kirsten; Lake, Michael K.

Amsterdam [u.a.] : Elsevier (2001)
Contribution to a conference proceedings, Journal Article

In: Surface & coatings technology
Volume: 142/144
Page(s)/Article-Nr.: 813-816

Institutions

• Chair of Surface Engineering [419010]