Plasma diagnostical comparison of the MSIP process of (Ti,Al)N with pulsed and dc power supplies using energy-resolved mass spectroscopy

Lugscheider, Erich; Bobzin, Kirsten; Papenfuß-Janzen, Norbert; Maes, Michael; Parkot, Daniel

Amsterdam [u.a.] : Elsevier (2004)
Contribution to a conference proceedings, Journal Article

In: Surface & coatings technology
Volume: 188/189
Page(s)/Article-Nr.: 164-167

Institutions

• Chair of Surface Engineering [419010]