Advancement in low melting solder deposition by pulsed magnetron sputter-PVD process for microsystemtechnology

Lugscheider, Erich; Bobzin, Kirsten; Maes, Michael; Ferrara, Stefania; Erdle, Anja

Amsterdam [u.a.] : Elsevier (2005)
Contribution to a conference proceedings, Journal Article

In: Surface & coatings technology
Volume: 200.2005
Issue: 1/4
Page(s)/Article-Nr.: 444-447

Institutions

• Chair of Surface Engineering [419010]