Simulation of the deposition process in PVD-technology

Lugscheider, Erich; Knotek, Otto; Barimani, Cyrus; Eckert, P.; Hayn, G.

Amsterdam [u.a.] : Elsevier (1996)
Journal Article

In: Computational materials science
Volume: 7
Issue: 1/2
Page(s)/Article-Nr.: 154-158

Institutions

• Chair of Surface Engineering [419010]