High power pulsed magnetron sputtering: fundamentals and applications

Alami, Jones; Bolz, Stephan Frédéric; Sarakinos, Kostas

Amsterdam [u.a.] : Elsevier (2009)
Contribution to a conference proceedings, Journal Article

In: Journal of alloys and compounds : JAL
Volume: 483.2009
Issue: 1/2
Page(s)/Article-Nr.: 530-534