Process windows and properties of tungsten- and vanadium - oxides deposited by MSIP - PVD - process

Knotek, Otto; Lugscheider, Erich; Bärwulf, Stephan; Barimani, Cyrus

New York, NY [u.a.] : North-Holland Publ. Co. (1998)
Contribution to a book, Contribution to a conference proceedings

In: Properties and Processing of Vapor-Deposited Coatings : Symposium held 30.11.-2.12.1998, Boston, Massachusetts, U.S.A. / [Symposium 00 Properties and Processing of Vapor-Deposited Coatings at the 1998 MRS Fall Meeting] / Johnson, R. N. [u.a.] Hrsg

Institutions

• Chair of Surface Engineering [419010]