On superstoichiometric Ti-C, Si-C and Ta-C PVD coatings

Knotek, Otto; Lugscheider, Erich; Löffler, Frank; Barimani, Cyrus; Schmitz, S.

(1995)
Contribution to a conference proceedings

In: MRS Fall Meet. Boston 1995

Institutions

  • Chair of Surface Engineering [419010]

Identifier