Confocal laser scanning microscope Keyence VK-X210

  Confocal laser scanning microscope Copyright: © Carl Brunn

By means of confocal laser scanning microscopy it is possible to determine three dimensional color pictures of surfaces with a high resolution and focus depth. The procedure is nondestructive since the surface is only irradiated by laser emission. The existing system at the IOT for this surface analysis method is a VK-X210 made by Keyence GmbH, Neu-Isenburg, Germany. The microscope is equipped with an additional motorized xy-axis positioning table which enables the recording of large area pictures by combining single pictures.

Technical data:

Parameter Value [Unit]
Laser λ [nm]

Halbleiterlaser, Violett, Wellenlänge λ = 408 nm

Objektive 10x, 20x, 50x, 150x
Lateral resolution 0,012 µm
Vertical resolution 0,0005 µm
Measured points/picture 2.048 x 1.536, 1.024 x 768, 800 x 600
Max. pictures/measurement 560
Positioning table range 100 x 100 mm
Positioning accuracy 0,1 - 100 µm/Impuls