Confocal laser scanning microscope Keyence VK-X210
By means of confocal laser scanning microscopy it is possible to determine three dimensional color pictures of surfaces with a high resolution and focus depth. The procedure is nondestructive since the surface is only irradiated by laser emission. The existing system at the IOT for this surface analysis method is a VK-X210 made by Keyence GmbH, Neu-Isenburg, Germany. The microscope is equipped with an additional motorized xy-axis positioning table which enables the recording of large area pictures by combining single pictures.
Technical data:
| Parameter | Value [Unit] |
|---|---|
| Laser λ [nm] |
Halbleiterlaser, Violett, Wellenlänge λ = 408 nm |
| Objektive | 10x, 20x, 50x, 150x |
| Lateral resolution | 0,012 µm |
| Vertical resolution | 0,0005 µm |
| Measured points/picture | 2.048 x 1.536, 1.024 x 768, 800 x 600 |
| Max. pictures/measurement | 560 |
| Positioning table range | 100 x 100 mm |
| Positioning accuracy | 0,1 - 100 µm/Impuls |