Optical Emission Spectrograph (OES) – TRIAX-180
The HORIBA Jobin Yvon TRIAX-180 is a compact monochromator with an exact wavelength resolution of 0.3 nm (grating: 1,200 lines/mm). Combined with the PULNIX TM-6CN camera and the powerful Plasus Monitor software the outcome is an optical emission spectrograph (OES), which unites a maximum of transportability and accuracy. By means of a changeable grating turret, which contains three gratings (e.g. 300, 600, 1,800 lines/mm), this OES is very flexible. Consequently, it is possible to measure the plasma composition during the coating process. Additionally, the OES can be used for automatically process controlling by in-situ measurements. The figure shows an example of a spectral diagram during the reactive deposition process of alumina it shows the intensity changes of the spectral lines of aluminum and oxygen in dependency of the oxygen flow.
Technical data:
| Parameter | Value [Unit] |
|---|---|
| Focal Length |
0.19 m |
| Aperture | f/3.9 |
| Grating Size | 50 x 50 mm |
| Resolution | 0.3 nm |
| Dispersion |
3.53 nm/mm |
| Accuracy | ± 0.3 nm |
| Repeatability | ± 0.06 nm |
| Step Size | 0.06 nm (nominal) |
| Slit | 0–2 mm in 2 µm step |