Retarding field energy analyser Semion pDCCopyright: © IOT
Retarding field analyzers allow the measurement of the ion energy distribution, which is an important parameter for the layer growth of physical vapour deposition thin films. The sensor of the counter field analyzer Semion pDC, Impedans, Dublin, Ireland, which is available at the institute, can be positioned very variably in the coating chamber. In this way it is possible to measure the ion energy distribution and the ion flux density on the substrate side. This is also possible by using a voltage at the substrate table, the so-called substrate bias, so that ion energy distributions, as they are present in industrial coating processes, can be determined.
0 to 2,500 eV
|Energy sensitivity||1 eV|
|Ion current densities||0.1 mA/cm² bis 20 mA/cm²|
|Maximal ion current||2 mA|