Mass Spectrometer Inficon Transpector 2
Mass spectroscopy is, together with optical emission spectroscopy, one of the most frequently used diagnostics, applied in the analysis of plasmas. It allows not only gathering information about the internal plasma parameters, but offers the application as process monitoring and controlling. Using mass spectroscopy the chemical plasma composition can be determined. The Inficon Transpector 2, Leybold GmbH, Cologne, Germany, is used to determine the chemical plasma composition with the residual gas analysis method. Further the outputs of the spectrometer can be taken for process control.
Technical data:
| Parameter | Value [Unit] |
|---|---|
| Detector Type |
EM/FC |
| Mass Range | 1 to 100 amu |
| Minimum Detectable Partial Pressure | FC: N/A EM: 6.6 · 10-15 mbar |
| Maximum Operating Pressure | 6.6 · 10-4 mbar |
| Operating Temperature | 20 °C to 50 °C ambient |