Energy Dispersive X-Ray Spectroscopy (EDX)

  Functional principle and a typical result of the EDX analysis Copyright: © IOT Functional principle of EDX-analysis (a) and typical spectra of an EDX-analysis (b)

The EDX measurement is carried out at the scanning electron microscope (SEM). The measurement method is based on interactions of the specimen surface, which are caused by the impinging electron beam. The collisions of electrons of the electron beam with electrons of the specimen cause excited states at the atoms and partially electrons are emitted. In order to move into a lower state of excitement, one electron of the outer shell jumps to fill the vacancy of the emitting electron when the energy quant is sent. The energy, i.e. the wavelength depends on the energy level of the electron paths and is thus permanently classifiable for element determination; the energy spectrum of the wavelengths is analysed.