Glow Discharge Spectrometer JY 5000 RFCopyright: © IOT
The Glow Discharge Optical Emission Spectroscopy (GODES) can be used for qualitative and quantitative element analysis of solids. With the spectrometer JY 5000 RF, HORIBA Jobin Yvon GmbH, Bensheim, Germany, it is possible to perform chemical analyses of solids and coatings. The basis for this measurement is the sputtering of the sample material through a radio frequency (rf) plasma and a subsequent spectral analysis of the emission spectrums of the sputtered species. The chemical composition of the material can be qualitatively determined according to the position of the spectral lines, which is characteristic for each element. Furthermore, the relative intensities of the spectral lines can be used for a quantitative analysis.
Spectral range, λ [nm]
|110 ≤ λ ≤ 620|
|Spectral resolution, R [pm]||18 ≤ R ≤ 25|
|Computer-assisted parameter monitoring|
|Analysis of conducting and non-conducting materials|