CemeCon CC800/9 Custom
The Cemecon CC800/9 Custom is an industrial coating facility using the magnetron sputtering technique. It is possible to produce coatings by means of medium frequency magnetron sputtering (mfMS) as well as high power pulse magnetron sputtering (HPPMS) at low-temperature T = 160 °C deposition processes. Furthermore, it is possible to produce carbon based coatings (Diamond-like Carbon (DLC)-coatings) using plasma enhanced chemical vapour deposition (PECVD)-Technology. The coatings that are deposited by the CemeCon CC800/9 Custom distinguish themselves through excellent wear behaviour under tribological load. DLC coatings are used in many applications today, e.g. bearings, diesel injection systems and pistons.
Technical data
| Parameter | Value |
|---|---|
| Coating chamber volume | 1,000 x 1,000 x 1,000 mm³ |
| Variable cathodes | up to 800 x 88 mm² |
| Cathode power | P = 10 kW |
| Process types | dcMS, mfMS, PECVD, HPPMS |
| Extensive plasma diagnostic available |